真空紫外光源
1. 产品介绍：
加拿大Resonance公司从20世纪70年代就开始和加拿大空间局（CSA）专业研发生产紫外光源，并在80-90年代和NASA有着密切的合作，现在生产的真空紫外光源是基于Ar,He,Xe的高功率高通量的三种型号紫外光源，波长从范围117-172nm。现在广泛用于土壤成分检测、气体检测、工业、石油业等。
2. 应用：
a. 工业污染控制（废水处理、废气处理）
b. 表面改性（聚合物光蚀刻、光诱导化学蒸汽沉积）
c. 做一些样品的的光谱测试
d. 样品的透光性检测
3. 产品参数：
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型号
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KrLM-L XeLM-L
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KrLM-LQD XeLM-LQD
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KrLM-LQD12
XeLM-LQD12
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ArCM-L KrCM-L XeCM-L
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ArCM-LPu KrCM-LPu XeCM-LPu
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ArCM-QDHP KrCM-QDHP XeCM-QDHP
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ArCM-LHP KrCM-LHP XeCM-LHP
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单位
|
|
状态
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Production
|
Production
|
Production
|
Production
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PreProd
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PreProd
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Development
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|
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峰值波长 Ar
|
|
|
|
128
|
128
|
128
|
128
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nm
|
|
峰值波长 Kr
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117, 124
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117, 124
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117, 124
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117,124, 145
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145
|
145
|
117, 124,
145
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nm
|
|
峰值波长 Xe
|
147
|
147
|
147
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147, 172
|
172
|
172
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147, 172
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nm
|
|
VUV通量 Ar
|
na
|
na
|
na
|
5 x 1014
|
1 x 1015
|
6 x 1015
|
2 x 1016
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P/sec/str
|
|
VUV通量 Kr
|
3 x 1015
|
3 x 1015
|
3 x 1015
|
5 x 1015
|
1 x 1016
|
6 x1016
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2 x 1017
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P/sec/str
|
|
VUV通量 Xe
|
5 x 1015
|
5 x 1015
|
5 x 1015
|
7 x 1015
|
1.5 x 1017
|
1 x 1017
|
3 x 1017
|
P/sec/str
|
|
全角输出圆锥
|
45
|
45
|
45
|
45
|
40
|
45
|
45
|
度
|
|
灯泡窗口位置
|
-4
|
+1
|
10 - 30
|
-4
|
-1
|
3 -20
|
3
|
cm
|
|
Window CA
|
0.8
|
0.8
|
0.8
|
0.8
|
0.8
|
6 x 0.8
|
6 x1.8
|
cm
|
|
调制和脉冲
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Mod/option
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Mod/option
|
Mod/option
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Mod/option
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P
2µsec/1KHz
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Mod/option
|
CW
|
|
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标准法兰
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2.75” CF
|
2。75” CF
|
2。75” CF
|
2.75” CF
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2.75” CF
|
4.5” CF
|
4.5” CF
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英寸
|
|
特点
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Opt. additional window or lens flange
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Rapid lamp interchange, closer to target
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Can be close to target deep in vac. chamber
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Continuum, good for absorption spectra
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Unique VUV pulses Photoionizatio n
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Higher intensity
|
Higher intensity
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|
|
型号
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AaBC-DEF where Aa = gas e. g. Kr = Krypton, Xe = Xenon; B = Line or continuum e. g. L = line and C = mixed continuum and line or pure
continuum, C=Window material e. g. M = Magnesium fluoride: -DEF is source configuration e. g. -L = standard lab model, QD = Quick
Disconnect, LPu = lab model pulsed, 12QD = 12 inch re-entrant lamp with Quick disconnect flange, LHP = Lab High
Power
|
|
状态
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Production = in production, PreProd = pre production prototype tested, Developmental: Still in development
|
|
光谱类型
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Line: lines at 116.5 and 123.6 nm Krypton, Lines at 129 and 147 Xenon (Argon lines not transmitted by MgF2 window), Mixed: lines at 116。5 and 123。6 nm and Excimer continuum from 123。6 to 170nm which peaks at 145nm, Xenon line at
147 and continuum pk 172
Continuum: Excimer continuum: Ar 110 to 140 nm, Kr 123.6 to 170 nm Xe 145 to 200
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窗口位置
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Relative to the front the CF flange face. – x。y are away from flange and +x。y depth into vacuum chamber from flange face.
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调制脉冲
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Mod/optional: Option to modulate from 1 to 1,000 Hz. P 2μsec/1KHz means that lamp has 2 microsecond pulses driven
by DC pulse supply at
about 1 KHz. Syncing this supply with an external waveform is possible, CW means continuous in time
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系统
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Complete system includes power supply, EMI shielded enclosure, Vacuum flange and NIST traceable test on vacuum monochromator
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